Japanese

Applied Electronics Laboratory
Prof. Kazuhiro HARA

Electronic Devices

Sensors on Environmental Monitoring

We are investigating sensors on environmental monitoring using IC fabrication and micromachining technologies. The sensing materials are semiconductor thin-films made of metal oxides. The sensors detect polluting gases such as NOx, SOx, and VOCs(Volatile Organic Compounds), exhausted gases, organic floating particles such as smoke, pollen, and mold, and bad smells. They have features of small size, small weight, low-cost and low-power consumption. In future the sensors are to be implemented in cellular phones, wristwatches, and robots.

Prof. Kazuhiro HARA

Cross-sectional views of two kind of sensors on environmental monitoring.

AFM picture of the surface of a sensing film.

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